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Tools for NanoTechnology Nanometer Calibration and Test Specimens
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*new* 70-1D/70-1DUTC
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150-2D /150-2DUTC
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150-1D/145TC |
750-HD
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300-1D |
*NEW* 300-2D |
301BE/292UTC
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700-1D |
700-2D |
PT |
NanoChannel Array with Stopper, 751-HD *NEW* |
We also sell traceable calibration
standards See an example of long-term calibration drift. |
What does traceability mean?
The calibration certificate for ordinary specimens gives an average pitch value
based on batch measurements. In contrast, the certificate of traceable
calibration reports the average pitch value and the uncertainty of single pitch
values, based on individual measurements of the actual specimen and the
measurements are traceable to the international meter. Our
traceability path is via PTB, the German counterpart of NIST. This is
equivalent to NIST traceability, based on a mutual recognition agreement for
nanoscale measurements among NIST, PTB, and other leading national measurement
labs.
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Application |
Product |
Pattern |
Approx. |
Material |
Mounting |
Remarks |
| AFM, SEM, Auger, FIB | 70-1D and 70-1DUTC | parallel ridges | 70 | SiO2 on Si | unmounted, on steel disk or on an SEM stub (extra charge) | Use contact or tapping mode. |
| AFM, SEM, Auger, STM | 150-2D and 150-2DUTC | Array of rounded bumps | 144 | Al on Si | unmounted, on steel disk, or on an SEM stub (extra charge) | use contact or tapping mode. Works well in SEM SEI and BEI modes |
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AFM,SEM*, TOF-SIMS, Auger, Surface Potential, other material contrast techniques. NSOM. |
150-1D and 145TC |
Parallel ridges |
144 |
Al lines on Glass |
unmounted or on steel disk |
use contact or tapping mode. *may require customer-deposited coating for SEM or Auger use. |
|
AFM,SEM, TOF-SIMS, Auger, Surface Potential, other material contrast techniques. |
301BE and 292UTC |
parallel ridges |
292 |
Ti lines on Si |
unmounted, on steel disk, or on an SEM stub (extra charge) |
use contact or tapping mode. Works well in SEM SEI and BEI modes |
|
AFM |
300-1D |
Parallel ridges |
288 |
W-coated Photoresist on Si |
15 mm steel disk |
use contact or TappingMode. |
|
AFM |
300-2D |
Array of Posts |
297 |
Al bumps on Si |
15 mm steel disk |
use contact or TappingMode |
|
AFM,SEM |
302-edu |
Array of Posts |
292 |
W-coated Photoresist on Si |
unmounted |
student grade. has high density of random scratches. use TappingMode |
|
AFM |
700-1D |
Parallel ridges |
700 |
W-coated Photoresist on Si |
15 mm steel disk |
use contact or TappingMode |
|
AFM |
700-2D |
Array of Posts |
700 |
W-coated Photoresist on Si |
15 mm steel disk |
use TappingMode |
|
AFM,SEM, STM |
Array of flat bumps |
750 (X), Z (100) |
Ni |
unmounted |
High Durability: TappingMode, Contact Mode, STM, Liquid, High Temperature |
|
|
AFM Phase Imaging |
PT |
random hard and soft domains as small as 10 nm |
none |
polymer |
15 mm steel disk |
test resolution and build confidence in phase imaging |
| Special Sample Preparation | 751-HD NanoChannel Array Substrate | array of ridges with occasional bulges ("stoppers") | n/a. Channel width about 370 nm, depth about 180 nm | Nickel | unmounted, see data sheet for details |
Confine
materials in channel. Use ridges as NanoAnvil in 3-point bend test. Priced for use as disposable substrate. Not intended as a calibrator. |
* A certificate accompanies each specimen giving the actual pitch value.
| Specimen | TappingModeTM | Contact Mode | STM | Liquid | High Temperature |
| 70-1D, 70-1DUTC | Yes | Yes | No | Not yet tested | Not yet tested |
| 301BE, 292UTC | Yes | Yes | No | Not yet tested | Not yet tested |
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150-2D, 150-2DUTC, 300-2D. |
Yes | Yes | Yes | Not yet tested | Not yet tested |
| 150-1D, 145TC | Yes | Yes | No | Not yet tested | Not yet tested |
| 300-1D, 700-1D | Yes | Yes | No | No | No |
| 700-2D, 302-edu | Yes | No | No | No | No |
| 750-HD | Yes | Yes | Yes | Yes | Yes |
| 751-HD | Yes | Yes | Yes | Yes | Yes |
| PT | Yes | Yes | No | Yes | No |
Specimens available unmounted, mounted on steel disks, or mounted on SEM mounts.
"The Model 150-2D calibration specimen arrived promptly and has already helped us identify a problem with one of our
AFMs."
- A. J. Katan, University of Leiden, The Netherlands
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This page last updated 03/19/2010
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