Accurate measurement of the size of a piece of cake may not be the most important thing in the world. Other measurements are much more important. However, the accuracy of the measurement can be no better than the accuracy of the scale. And unless the different scales agree with each other, the measurements won't agree either. To ensure that various scales agree with each other, measurements standards have been established and used to ensure that different measurement tools agree.
Measurement accuracy is also important in the microscopic realm. As dimensional tolerances for such applications as semiconductors and optical discs get tighter, the need for precision length standards at the nanometer length scales becomes more important. The sophisticated measuring tools used to measure these features, tools such as Atomic Force Microscopes and Scanning Electron Microscopes, require periodic calibration to produce accurate results. Calibration specimens with feature sizes or positions directly traceable to international length standards are key tools to producing accurate and reliable results.
Advanced Surface Microscopy's Model 70-1DUTC, 292UTC, 150-2DUTC, and Model 145TC calibration specimens provide those tools. These specimens are useable with a variety of measurement tools such as Atomic Force and Scanning Electron microscopes. The specimens are traceable to the International Meter and come with a certificate stating both the mean feature spacing (pitch) and the uncertainty. The 70-1DUTC specimen is now NIST-traceable (as of June 30, 2010).
| Model | Physical Size | Structure | Calibrated Period | Applicable Instruments |
| 292 UTC (see data sheet) | 4 mm X 3 mm X 0.5 mm | Grating of Titanium ridges on Si substrate (ridge height 30-40 nm*) | 292 nm | AFM, SEM, FIB, Auger |
| 150-2DUTC (see data sheet) | 4 mm X 3 mm X 0.5 mm | Square grid of aluminum bumps on Si substrate (bump height 70-90 nm*) | 144 nm | AFM, SEM, FIB, Auger, STM |
| 70-1DUTC (see data sheet) | 4 mm X 3 mm X 0.5 mm | Grating of silicon oxide ridges on silicon (ridge height 30-35 nm*) | 70 nm | AFM, SEM, FIB, Auger |
| 145 TC | 6 mm X 4 mm X 0.5 mm | Grating of Aluminum ridges on a glass substrate (ridge height 90-110 nm*) | 145 nm | AFM, SNOM |
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Advanced Surface Microscopy, Inc.3250 N. Post Rd., Suite 120 |
last updated 08/05/2010
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