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CD stamper bumps, perspective view

 

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Traceable nanometer calibration specimens

How big is your piece of cake?

 

How accurately you can measure something depends on how accurate your ruler is.

Accurate measurement of the size of a piece of cake may not be the most important thing in the world.  Other measurements are much more important.  However, the accuracy of the measurement can be no better than the accuracy of the scale.  And unless the different scales agree with each other, the measurements won't agree either.  To ensure that various scales agree with each other, measurements standards have been established and used to ensure that different measurement tools agree.

Measurement accuracy is also important in the microscopic realm.  As dimensional tolerances for such applications as semiconductors and optical discs get tighter, the need for precision length standards at the nanometer length scales becomes more important.  The sophisticated measuring tools used to measure these features, tools such as Atomic Force Microscopes and Scanning Electron Microscopes, require periodic calibration to produce accurate results.  Calibration specimens with feature sizes or positions directly traceable to international length standards are key tools to producing accurate and reliable results.

Advanced Surface Microscopy's Model 292UTC, 150-2DUTC, and Model 145TC calibration specimens provides that tool.  These specimens are useable with a variety of measurement tools such as Atomic Force and Scanning Electron microscopes.  The specimens are traceable to the International Meter and come with a certificate stating both the mean feature spacing (pitch) and the uncertainty.

Learn about the difference betwen a traceable calibration STANDARD and an ordinary calibration REFERENCE specimen.  

Model Physical Size Structure Calibrated Period** Applicable Instruments
70-1DUTC (see FAQ) 4 mm X 3 mm X 0.5 mm Si oxide ridges on Si 70 nm AFM, SEM, FIB, Auger
292 UTC (see data sheet) 4 mm X 3 mm X 0.5 mm Grating of Titanium ridges on Si substrate (ridge height 30-40 nm*) 292 nm  AFM, SEM, FIB, Auger
150-2DUTC (see data sheet) 4 mm X 3 mm X 0.5 mm Square grid of aluminum bumps on Si substrate (bump height 70-90 nm*) 144 nm AFM, SEM, FIB, Auger, STM
145 TC 6 mm X 4 mm X 0.5 mm Grating of Aluminum ridges on a glass substrate (ridge height 90-110 nm*) 145 nm AFM, SNOM
700-1DUTC (see data sheet) 4mm X 3 mm X 0.5 mm Grating of Tungsten coated developed photoresist on Si substrate. 700 nm AFM, SNOM
* Typical value, not a calibrated dimension
** Representative value.  See calibration sheet for precise value for individual specimen.

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