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Helping Solve Processing and Materials  Problems using Scanning Probe Microscopy since 1990.

CD stamper bumps, perspective view

 

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Phone:  1-800-374-8557  Fax: 1-317-895-5652
e-mail: info@asmicro.com

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Tools for NanoTechnology Nanometer Calibration and Test Specimens

 


 

Download our calibrator guide as a PDF

 

See our new 700-1DUTC!

*new*  70-1D/70-1DUTC

AFM image of Model 70-1D Calibration specimen

button Details

150-2D /150-2DUTC

AFM image of Model 150-2D Calibration Specimen
(3x3 um AFM scan)

button Details

150-1D/145TC

AFM image of Model 150-1D/145TC Calibration Specimen

button Details

750-HD 

AFM Image of Model 750-HD Calibration Specimen
(4 um AFM scan)

button Details

300-1D

AFM Image of Model 300-!D calibration specimen

button Details

 

*NEW* 300-2D

AFM Image of Model 300-2D Calibration Specimen

button Details

301BE/292UTC

AFM image of Model 301BE Calibration Specimen

button Details

700-1D/700-1DUTC
*NEW*

AFM Image of Model 700-1D Calibration Specimen

button Details

700-2D

AFM image of Model 700-2D Calibration Specimen

 

button Details

PT

AFM image of Model PT Phase Test specimen

button Details

NanoChannel Array with Stopper, 751-HD  *NEW*

AFM image of Model 751-HD NanoChannel Array

button Details

We also sell traceable calibration standards
See an example of long-term calibration drift.
 

Sample Dimension and Pattern Orientation.


Traceable Calibration is now available for the 70-1D, 301BE, 150-2D, and 150-1D specimens, as models 70-1DUTC, 292 UTC, 150-DUTC, and 145 TC.  This helps you achieve higher quality and meet ISO-9000 and 14000 requirements. Learn about the difference betwen a traceable calibration STANDARD and an ordinary calibration REFERENCE specimen.  

What does traceability mean?
The calibration certificate for ordinary specimens gives an average pitch value based on batch measurements.  In contrast, the certificate of traceable calibration reports the average pitch value and the uncertainty of single pitch values, based on individual measurements of the actual specimen and the measurements are traceable to the international meter.  Our traceability path for 70-1DUTC is via NIST.  Our traceability path for 150-2DUTC, 145TC, 292UTC, and 700-1DUTC is via PTB, the German counterpart of NIST.  This is equivalent to NIST traceability, based on a mutual recognition agreement for nanoscale measurements among NIST, PTB, and other leading national measurement labs.

Application

Product

Pattern

Approx.
Pitch* (nm)

Material

Mounting

Remarks

AFM, SEM4, Auger, FIB 70-1D (out of stock) and 70-1DUTC parallel ridges 70 SiO2 on Si unmounted, on steel disk or on an SEM stub (extra charge) Use contact or tapping mode.  Works well in SEM
AFM, SEM4, Auger, STM3 150-2D and 150-2DUTC Array of rounded bumps 144  Al on Si unmounted, on steel disk, or on an SEM stub (extra charge) use contact or tapping mode.  Works well in SEM SEI and BEI modes

AFM,SEM2, TOF-SIMS, Auger2, Surface Potential, other material contrast techniques. NSOM5.

150-1D and 145TC

Parallel ridges

144

Al lines on Glass

unmounted or on steel disk

use contact or tapping mode.

AFM, SEM4, TOF-SIMS, Auger, Surface Potential, other material contrast techniques.

301BE and 292UTC

parallel ridges

292

Ti lines on Si

unmounted, on steel disk, or on an SEM stub (extra charge)

use contact or tapping mode.  Works well in SEM SEI and BEI modes

AFM, SEM

300-1D

Parallel ridges

288

W-coated Photoresist on Si

15 mm steel disk

use contact or TappingMode.

AFM, SEM

300-2D

Array of Posts

 297

Al bumps on Si

15 mm steel disk

use contact or TappingMode 

AFM, SEM

700-1D

Parallel ridges

700

W-coated Photoresist on Si

15 mm steel disk

use contact or TappingMode

AFM, SEM

700-2D

Array of Posts

700

W-coated Photoresist on Si

15 mm steel disk

use TappingMode 

AFM, SEM4, STM, Extreme Environments

750-HD

Array of flat bumps

750 (X), Z (100)

Ni

unmounted

High Durability:  TappingMode, Contact Mode, STM, Liquid, High Temperature

AFM Phase Imaging

PT

random hard and soft domains as small as 10 nm 

none

polymer

15 mm steel disk

test resolution and build confidence in phase imaging

AFM, Nanomechanics, Nanofluidics 751-HD NanoChannel Array Substrate array of ridges with occasional bulges ("stoppers") n/a. Channel width about 370 nm, depth about 180 nm  Nickel  unmounted, see data sheet for details Confine materials in channel. Use ridges as NanoAnvil in 3-point bend test.
Priced for use as disposable substrate. Not intended as a calibrator.
Specimen compatibility - 
AFM and STM Scanning Modes and Special Environments:
Specimen TappingModeTM Contact Mode STM SEM, Auger, and similar techniques4 Liquid High Temperature
70-1D, 70-1DUTC Yes Yes No Yes Not yet tested Not yet tested
301BE, 292UTC Yes Yes No Yes Not yet tested Not yet tested
150-2D, 150-2DUTC,
300-2D, 302-edu
Yes Yes Yes Yes Not yet tested Not yet tested
150-1D, 145TC Yes Yes No Yes Not yet tested Not yet tested
300-1D, 700-1D Yes Yes No No No No
700-2D Yes No No No No No
750-HD Yes Yes Yes No Yes Yes
751-HD Yes Yes Yes No Yes Yes
PT Yes Yes No No Yes No
Specimens can be gold coated by user for STM.  Sorry, no warranty or refund after you modify the specimen.

Specimens available unmounted, mounted on steel disks, or mounted on SEM mounts.

What customers say about our Calibration and Test Specimens

"The Model 150-2D calibration specimen arrived promptly and has already helped us identify a problem with one of our AFMs." 
    - A. J. Katan, University of Leiden, The Netherlands

Prices

Download our calibrator guide as a PDF

1 A certificate accompanies each specimen giving the actual pitch value. 

2 may require customer-deposited coating for SEM or Auger use

3 a conductive coating may be required for STM use.

4 Available unmounted or mounted (extra cost - please specify desired stub).

5. SNOM is Scanning Near-field Optical Microscopy, sometimes called NSOM (near-field scanning optical microscopy).

 

 

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