Test – Advanced Surface Microscopy, Inc.

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Calibration Specimen Details

Application	Product	Pattern	Approx. Pitch¹ (nm)	Material	Mounting	Remarks
AFM, SEM⁴, Auger, FIB	70-1D (out of stock) and 70-1DUTC	parallel ridges	70	SiO2 on Si	unmounted, on steel disk or on an SEM stub (extra charge)	Use contact or tapping mode. Works well in SEM
AFM, SEM⁴, Auger, STM³	150-2D and 150-2DUTC	Array of rounded bumps	144	Al on Si	use contact or tapping mode. Works well in SEM SEI and BEI modes	use contact or tapping mode. Works well in SEM SEI and BEI modes
AFM,SEM², TOF-SIMS, Auger2, Surface Potential, other material contrast techniques. NSOM⁵.	150-1D and 145TC	Parallel ridges	144	Al lines on Glass	unmounted or on steel disk	use contact or tapping mode.
AFM, SEM⁴, TOF-SIMS, Auger, Surface Potential, other material contrast techniques.	301BE and 292UTC	parallel ridges	292	Ti lines on Si	unmounted, on steel disk, or on an SEM stub (extra charge)	use contact or tapping mode. Works well in SEM SEI and BEI modes
AFM, SEM	300-1D	Parallel ridges	288	W-coated Photoresist on Si	15 mm steel disk	use contact or TappingMode.
AFM, SEM	300-2D	Array of Posts	297	Al bumps on Si	15 mm steel disk	use contact or TappingMode
AFM, SEM	700-1D	Parallel ridges	700	W-coated Photoresist on Si	15 mm steel disk	use contact or TappingMode
AFM, SEM	700-2D	Array of Posts	700	W-coated Photoresist on Si	15 mm steel disk	use TappingMode
AFM, SEM⁴, STM, Extreme Environments	750-HD	Array of flat bumps	750 (X), Z (100)	Ni	unmounted	High Durability: TappingMode, Contact Mode, STM, Liquid, High Temperature
AFM Phase Imaging	PT	random hard and soft domains as small as 10 nm	none	polymer	15 mm steel disk	test resolution and build confidence in phase imaging
AFM, Nanomechanics, Nanofluidics	751-HD NanoChannel Array Substrate	array of ridges with occasional bulges ("stoppers")	n/a. Channel width about 370 nm, depth about 180 nm	Nickel	unmounted, see data sheet for details	Confine materials in channel. Use ridges as NanoAnvil in 3-point bend test. Priced for use as disposable substrate. Not intended as a calibrator.

Specimen compatibility - AFM and STM Scanning Modes and Special Environments:

Specimen	TappingModeTM	Contact Mode	STM	SEM, Auger, and similar techniques⁴	Liquid	High Temperature
70-1D, 70-1DUTC	Yes	Yes	No	Yes	Not yet tested	Not yet tested
301BE, 292UTC	Yes	Yes	No	Yes	Not yet tested	Not yet tested
150-2D, 150-2DUTC,	Yes	Yes	Yes	Yes	Not yet tested	Not yet tested
300-2D, 302-edu	Yes	Yes	Yes	Yes	Not yet tested	Not yet Tested
150-1D, 145TC	Yes	Yes	No	Yes	Not yet tested	Not yet tested
300-1D, 700-1D	Yes	Yes	No	No	No	No
700-2D	Yes	No	No	No	No	No
750-HD	Yes	Yes	Yes	No	Yes	Yes
751-HD	Yes	Yes	Yes	No	Yes	Yes
PT	Yes	Yes	No	No	Yes	No

Specimens can be gold coated by user for STM. Sorry, no warranty or refund after you modify the specimen.

Specimens available unmounted, mounted on steel disks, or mounted on SEM mounts.

What customers say about our Calibration and Test Specimens

“The Model 150-2D calibration specimen arrived promptly and has already helped us identify a problem with one of our AFMs.”
– A. J. Katan, University of Leiden, The Netherlands

1 A certificate accompanies each specimen giving the actual pitch value.

2 may require customer-deposited coating for SEM or Auger use

3 a conductive coating may be required for STM use.

4 Available unmounted or mounted (extra cost – please specify desired stub).

5. SNOM is Scanning Near-field Optical Microscopy, sometimes called NSOM (near-field scanning optical microscopy).