70-1D/70-1DUTC

Notice:  The Model 70-1D is out of stock.  A limited number of 70-1DUTC remain.

 Details

  • Applications:  AFM, SEM, Auger, FIB

  • Pattern:  parallel ridges

  • Approximate Pitch1:  70 nm

  • Material:  SiO2 on Si

  • Mounting:  Unmounted, On 12 or 15 mm Steel Disk, or on SEM Stub (extra charge)

  • Remarks:  Use Contact or Tapping mode AFM.  Works well in SEM 

150-2D/150-2DUTC

3X3 um AFM scan

Details

  • Applications:  AFM, SEM, Auger, STM
  • Pattern:  Array of rounded bumps
  • Approximate Pitch1:  144 nm
  • Material:  Si bumps on Si
  • Mounting:  Unmounted, on 12 or 15 mm Steel Disk, or on SEM Stub (extra charge)
  • Remarks:  use contact or tapping mode.  Works well in SEM.

150-1D/145TC

Details

  • Applications:  AFM,SEM2, TOF-SIMS, Auger, Surface Potential, other material contrast techniques. NSOM’s Super Resolution Optical Microscopy
  • Pattern:  Parallel Ridges
  • Approximate Pitch1:  144 nm
  • Material:  Al lines on Glass
  • Mounting:  Unmounted or on 12 or 15 mm steel disk
  • Remarks:  use contact or tapping mode..

750-HD

Details

  • Applications:  AFM,SEM, STM
  • Pattern:  Array of flat bumps
  • Approximate Pitch1:  X 750, Z 100 nm
  • Material:  Ni
  • Mounting:  Unmounted
  • Remarks:  High Durability: TappingMode, Contact Mode, STM, Liquid, High Temperature

300-1D

Details

  • Applications:  AFM, SEM
  • Pattern:  Parallel Ridges
  • Approximate Pitch1:  288 nm
  • Material:  W-coated Photoresist on Si
  • Mounting:  12 or 15 mm steel disk
  • Remarks:  use contact or TappingMode.

300-2D

Details

  • Applications:  AFM, SEM
  • Pattern:  Array of posts
  • Approximate Pitch1:  297 nm
  • Material:Al bumps on Si
  • Mounting:  12 or 15 mm steel disk
  • Remarks:  use contact or TappingMode.

301BE/292UTC

2.5 um AFM scan.

Details

  • Applications:  AFM, SEM, TOF-SIMS, Auger, Surface Potential, other material contrast techniques
  • Pattern:  Parallel Ridges
  • Approximate: Pitch:  292 nm
  • Material:  Ti lines on Si
  • Mounting:  unmounted, on steel disk, or on an SEM stub (extra charge)
  • Remarks:  use contact or tapping mode.  Works well in SEM SEI and BEI modes.

700-1D/700-1DUTC

Details

  • Applications:  AFM, SEM
  • Pattern:  Parallel Ridges
  • Approximate Pitch1:  700 nm
  • Material:  W coated photoresist on Si.
  • Mounting:  12 or 15 mm steel disk
  • Remarks:  use contact or tapping mode.

700-2D

Details

  • Applications:  AFM, SEM
  • Pattern:  Array of Posts
  • Approximate Pitch1:  700 nm
  • Material:  W coated Photoresist on Si.
  • Mounting:  12 or 15 mm steel disk
  • Remarks:  use contact or tapping mode.

PT

Details

  • Applications:  AFM Phase Imaging
  • Pattern:  random hard and soft domains as small as 10 nm
  • Approximate Pitch:  N/A
  • Material:  Polymer.
  • Mounting:  15 mm steel disk
  • Remarks:  Test resolution and build confidence in phase imaging.

NanoChannel Array with Stopper, 751-HD

Details

  • Applications:  AFM, nanomechanics, nanofluidics
  • Pattern:  array of ridges with occasional bulges (“stoppers”)
  • Approximate Pitch1:  n/a. Channel width about 370 nm, depth about 180 nm
  • Material:  Ni.
  • Mounting:  unmounted, see data sheet for details
  • Remarks:  Confine materials in channel. Use ridges as NanoAnvil in 3-point bend test.
    Priced for use as disposable substrate. Not intended as a calibrator.

We also sell traceable calibration standards

See an example of long-term calibration drift

Sample Dimension and Pattern Orientation.

Traceable Calibration is now available for the 70-1D, 301BE, 150-2D, and 150-1D specimens, as models 70-1DUTC, 292 UTC, 150-DUTC, and 145 TC.  This helps you achieve higher quality and meet ISO-9000 and 14000 requirements. Learn about the difference between a traceable calibration STANDARD and an ordinary calibration REFERENCE specimen.

What does traceability mean?
The calibration certificate for ordinary specimens gives an average pitch value based on batch measurements.  In contrast, the certificate of traceable calibration reports the average pitch value and the uncertainty of single pitch values, based on individual measurements of the actual specimen and the measurements are traceable to the international meter.  Our traceability path for 70-1DUTC is via NIST.  Our traceability path for 150-2DUTC, 145TC, 292UTC, and 700-1DUTC is via PTB, the German counterpart of NIST.  This is equivalent to NIST traceability, based on a mutual recognition agreement for nanoscale measurements among NIST, PTB, and other leading national measurement labs.

Application Product Pattern Approx.
Pitch1 (nm)
Material Mounting Remarks
AFM, SEM4, Auger, FIB 70-1D (out of stock) and 70-1DUTC parallel ridges 70 SiO2 on Si unmounted, on steel disk or on an SEM stub (extra charge) Use contact or tapping mode.  Works well in SEM
AFM, SEM4, Auger, STM3 150-2D and 150-2DUTC Array of rounded bumps 144 Si on Si unmounted, on steel disk, or on an SEM stub (extra charge) use contact or tapping mode.  Works well in SEM SEI and BEI modes
AFM,SEM2, TOF-SIMS, Auger2, Surface Potential, other material contrast techniques. NSOM5. 150-1D and 145TC Parallel ridges 144 Al lines on Glass unmounted or on steel disk use contact or tapping mode.
AFM, SEM4, TOF-SIMS, Auger, Surface Potential, other material contrast http://asmicro.com/301be-292utc/echniques. 301BE and 292UTC parallel ridges 292 Ti lines on Si unmounted, on steel disk, or on an SEM stub (extra charge) use contact or tapping mode.  Works well in SEM SEI and BEI modes
AFM, SEM 300-1D Parallel ridges 288 W-coated Photoresist on Si 15 mm steel disk use contact or TappingMode.
AFM, SEM 300-2D Array of Posts  297 Al bumps on Si 15 mm steel disk use contact or TappingMode
AFM, SEM 700-1D Parallel ridges 700 W-coated Photoresist on Si 15 mm steel disk use contact or TappingMode
AFM, SEM 700-2D Array of Posts 700 W-coated Photoresist on Si 15 mm steel disk use TappingMode
AFM, SEM4, STM, Extreme Environments 750-HD Array of flat bumps 750 (X), Z (100) Ni unmounted High Durability: TappingMode, Contact Mode, STM, Liquid, High Temperature
AFM Phase Imaging PT random hard and soft domains as small as 10 nm none polymer 15 mm steel disk test resolution and build confidence in phase imaging
AFM, Nanomechanics, Nanofluidics 751-HD NanoChannel Array Substrate array of ridges with occasional bulges (“stoppers”) n/a. Channel width about 370 nm, depth about 180 nm Nickel unmounted, see data sheet for details Confine materials in channel. Use ridges as NanoAnvil in 3-point bend test.
Priced for use as disposable substrate. Not intended as a calibrator.

Specimen compatibility –
AFM and STM Scanning Modes and Special Environments:

Specimen TappingModeTM Contact Mode STM SEM, Auger, and similar techniques4 Liquid High Temperature
70-1D, 70-1DUTC Yes Yes No Yes Not yet tested Not yet tested
301BE, 292UTC Yes Yes No Yes Not yet tested Not yet tested
150-2D, 150-2DUTC,
300-2D, 302-edu
Yes Yes Yes Yes Not yet tested Not yet tested
150-1D, 145TC Yes Yes No Yes Not yet tested Not yet tested
300-1D, 700-1D Yes Yes No No No No
700-2D Yes No No No No No
750-HD Yes Yes Yes No Yes Yes
751-HD Yes Yes Yes No Yes Yes
PT Yes Yes No No Yes No

Specimens can be gold coated by user for STM.  Sorry, no warranty or refund after you modify the specimen.

Specimens available unmounted, mounted on steel disks, or mounted on SEM mounts.

What customers say about our Calibration and Test Specimens

“The Model 150-2D calibration specimen arrived promptly and has already helped us identify a problem with one of our AFMs.”
– A. J. Katan, University of Leiden, The Netherlands

Notes

1 A certificate accompanies each specimen giving the actual pitch value.

2 may require customer-deposited coating for SEM or Auger use

3 a conductive coating may be required for STM use.

4 Available unmounted or mounted (extra cost – please specify desired stub).

5. SNOM is Scanning Near-field Optical Microscopy, sometimes called NSOM (near-field scanning optical microscopy).